JPH0446537U - - Google Patents
Info
- Publication number
- JPH0446537U JPH0446537U JP8748490U JP8748490U JPH0446537U JP H0446537 U JPH0446537 U JP H0446537U JP 8748490 U JP8748490 U JP 8748490U JP 8748490 U JP8748490 U JP 8748490U JP H0446537 U JPH0446537 U JP H0446537U
- Authority
- JP
- Japan
- Prior art keywords
- marks
- mask alignment
- photolithography
- row
- intervals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 2
- 238000000206 photolithography Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8748490U JPH0446537U (en]) | 1990-08-23 | 1990-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8748490U JPH0446537U (en]) | 1990-08-23 | 1990-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0446537U true JPH0446537U (en]) | 1992-04-21 |
Family
ID=31819864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8748490U Pending JPH0446537U (en]) | 1990-08-23 | 1990-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446537U (en]) |
-
1990
- 1990-08-23 JP JP8748490U patent/JPH0446537U/ja active Pending
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